Hardness of nc-TiN/a-Si3N4 nanocomposites which was determined by using two methods of measurements i. e. depth sensing method and remaining plastic indentation area that were magnified by using SEM (Scanning Electron Microscope) lie in the good agreement. The hardness value is not influenced by the biaxial and residual compressive stress. The measurement of the biaxial stress on the substrate shows a very small value of biaxial stress as well as the constant hardness and crystallite size against annealing temperature. Therefore, the reported hardness value here is the intrinsic value that depend on its microstructure properties.

Bahasa Abstract

Kekerasan nanokomposit nc-TiN/a-Si3N4 yang diperoleh dengan dengan dua metode pengukuran yaitu pengukuran kedalaman indentor dan pengukuran luas bekas indentasi yang diperbesar dengan SEM (Scanning Electron Microscope) memberikan hasil yang sama. Nilai kekerasan yang diperoleh tidak dipengaruhi oleh biaksial dan residual kompresif stress. Pengukuran biaksial stress pada substrat menghasilkan nilai yang sangat kecil dan perlakuan termal menunjukkan kekerasan yang tetap dengan ukuran butir yang tetap. Kekerasan yang diperoleh diyakini sebagai nilai kekerasan yang intrinsik yang tergantung pada sifat mikrostrukturnya.


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