The role of Si3N4 amorphous phase in nc-TiN/a-Si3N4 nanocomposites will be shown and compared with polycrystalline ZrN/Ni which has no such amorphous phase (non-composites). The presence of amorphous phase Si3N4 increases the hardness of film as well as the toughness of the bulk nanocomposites under indentation load. It has been observed that nc-TiN/a-Si3N4 nanocomposites films has higher thermal stability than ZrN/Ni polycrystalline films.

Bahasa Abstract

Peranan fase amorf Si3N4 dalam nanokomposit nc-TiN/a-Si3N4 akan ditunjukkan serta dibandingkan dengan polikristal ZrN/Ni yang tidak memiliki fase amorf (non-komposit). Kehadiran fase amorf Si3N4 ini selain meningkatkan kekerasan, juga meningkatkan ketangguhan nanokomposit selama indentasi. Juga diamati lapisan tipis nanokomposit nc-TiN/ a-Si3N4memiliki kestabilan termal yang lebih tinggi dibandingkan dengan polikristal ZrN/Ni.


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