Adjustable Resonance Frequency of RF-MEMS Capacitor by Using Comb- Drive Actuators: A Design Approaches

Authors

Agus Santoso Tamsir, Head of MinaEMS-RG (Micro-Nano Electro-Mechanical System-Research Group), Department of Electrical Engineering, Universitas Indonesia, Depok 16424, IndonesiaFollow
Sandy Tannu Wijaya, Department of Electrical Engineering, Faculty of Engineering, Universitas Indonesia, Depok 16424, Indonesia
Dato’ Burhanuddin Yeop Majlis, Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor, Malaysia

Abstract

The needs of smaller size RF varactor is a must today, and MEMS comes to be the potential one. In this paper we proposed an adjustable resonance RF-MEMS varactor by using comb-drive actuators placing in each side of the square movable plate. In our preliminary simulation, we found that the device can work properly but some constraints comes such as the dominancies of harmonic resonance frequencies that influences into the nominal capacitances. Therefore for the next step of development we have to find out the window of the structural dimension for a certain spans and a certain operating frequencies.

Bahasa Abstract

Frekuensi Resonansi yang dapat Disesuaikan dari Kapasitor RF-MEMS dengan Menggunakan Aktuator Comb- Drive: Pendekatan Rancangan. Kebutuhan RF varactor berukuran lebih kecil merupakan keharusan sekarang ini, dan MEMS menjadi yang berpotensial. Dalam makalah ini kami mengusulkan RF-MEMS varactor resonansi yang dapat disesuaikan dengan menggunakan aktuator comb-drive yang diletakkan pada masing-masing sisi pelat segi empat yang dapat bergerak. Dalam simulasi awal yang kami lakukan, kami menemukan bahwa peralatan ini dapat bekerja dengan baik tetapi terdapat beberapa kendala seperti dominansi frekuensi resonansi harmonis yang mempengaruhi ke dalam kapasitansi nominal. Oleh karena itu, untuk langkah perkembangan berikutnya kami harus mengetahui jendela dimensi struktural untuk rentang tertentu dan frekuensi pengoperasian tertentu.

References

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Recommended Citation

Tamsir, Agus Santoso; Wijaya, Sandy Tannu; and Majlis, Dato’ Burhanuddin Yeop (2014) "Adjustable Resonance Frequency of RF-MEMS Capacitor by Using Comb- Drive Actuators: A Design Approaches," Makara Journal of Technology: Vol. 18: Iss. 2, Article 2.
DOI: 10.7454/mst.v18i2.2942
Available at: https://scholarhub.ui.ac.id/mjt/vol18/iss2/2