Growth of CrSi2 Nanostructures Using CrCl2 Powder on Si Substrates

Authors

Wen Li, Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
Meng Erchao, Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
Tomoji Matsushita, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
Shingo Oda, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
Daisuke Ishikawa, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
Kaito Nakane, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan
Hirokazu Tatsuoka, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan

Abstract

Chromium disilicide (CrSi2) nanostructures were grown by the exposure of Si (111) substrates to CrCl2 vapor in an argon gas flow at atmospheric pressure without using any metal catalyst. Dependence of the growth condition on the structural property was investigated. Hexagonal-shaped CrSi2 microrods were grown at 750 °C with 0.05 g of CrCl2. As the quantity of CrCl2 increased to 0.1 g, the bundle of CrSi2 nanowires with microrods and web-liked CrSi2 nanostructure with turning angles were grown at 750 °C and 700 °C, respectively. The preliminary discussion on the growth mechanism of CrSi2 micro- and nanostructures was carried out.

Bahasa Abstract

Pertumbuhan Struktur Nano CrSi2 dengan Serbuk CrC12 pada Substrat Si. Struktur-struktur nano kromium disilisida (CrSi2) dapat dikembangkan dengan paparan substrat Si (111) pada uap CrCl2 di dalam aliran gas argon dengan tekanan atmosfer tanpa menggunakan katalis metal apa pun. Ketergantungan kondisi perkembangan pada elemen struktural juga diselidiki. Mikrorod CrSi2 berbentuk heksagon dikembangkan pada suhu 750 °C dengan CrCl2 sebanyak 0,05 g. Ketika kuantitas CrCl2 meningkat menjadi 0,1 g, bundel kawat-kawat nano CrSi2 dengan mikrorod dan struktur nano CrSi2 berbentuk jaring dengan sudut putar mengalami perkembangan yang masing-masing terjadi pada suhu 750 °C dan 700 °C. Pembahasan pendahuluan juga diberikan mengenai mekanisme pertumbuhan struktur mikro dan nano CrSi2.

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Recommended Citation

Li, Wen; Erchao, Meng; Matsushita, Tomoji; Oda, Shingo; Ishikawa, Daisuke; Nakane, Kaito; and Tatsuoka, Hirokazu (2013) "Growth of CrSi2 Nanostructures Using CrCl2 Powder on Si Substrates," Makara Journal of Technology: Vol. 17: Iss. 1, Article 5.
DOI: 10.7454/mst.v17i1.1923
Available at: https://scholarhub.ui.ac.id/mjt/vol17/iss1/5