Synthesis of Tungsten Oxide Nanowires onto ITO Glass Using T-CVD

Authors

Tomy Abuzairi, Graduate Institute of Electro-Optical Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan, R.O.C.Follow
Bohr-Ran Huang, Graduate Institute of Electro-Optical Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan, R.O.C.
Tzu-Ching Lin, Department of Electronic Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan, R.O.C.

Abstract

Tungsten oxide is an n-type semiconductor with interesting physical and chemical properties that make it suitable for various technological applications. Tungsten oxide nanowires were synthesized not only at low temperature but also without the use of any catalysts. The tungsten oxide nanowires were synthesized at 550 °C with tungsten layers onto the ITO glass using thermal chemical vapor deposition (T-CVD). The SEM image shows that the tungsten oxide nanowires are effectively grown with the 200 nm tungsten film. The Raman spectra shoulder at ~690 cm-1 proves the synthesized of tungsten oxide nanowires.

Bahasa Abstract

Sintesis Kawat Nano Tungsten Oksida pada Kaca ITO Menggunakan T-CVD. Tungsten oksida adalah semikonduktor tipe-N yang cocok digunakan dalam berbagai penerapan teknologi karena sifat fisik dan kimiawinya yang menarik. Kawat nano tungsten oksida bukan hanya disintesiskan pada suhu rendah, melainkan juga disintesiskan tanpa menggunakan katalisator. Sintesis antara kawat nano dan lapisan-lapisan tungsten dilakukan pada kaca ITO dalam suhu 550 °C dengan menggunakan pengendapan uap kimia termal (T-CVD). Citraan SEM menunjukkan bahwa pengembangan kawat nano tungsten oksida yang efektif adalah dengan menggunakan film tungsten berketebalan 200 nm. Sintesis kawat nano tungsten oksida dibuktikan dengan pengukuran spektroskopi raman yang mencapai ±690 cm-1.

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Recommended Citation

Abuzairi, Tomy; Huang, Bohr-Ran; and Lin, Tzu-Ching (2013) "Synthesis of Tungsten Oxide Nanowires onto ITO Glass Using T-CVD," Makara Journal of Technology: Vol. 17: Iss. 3, Article 1.
DOI: 10.7454/mst.v17i3.2820
Available at: https://scholarhub.ui.ac.id/mjt/vol17/iss3/1